Apparatus for thermal characterization under non-uniform heat load

ABSTRACT

What is disclosed is an apparatus for determining the cooling characteristics of a cooling device used for transferring heat from an electronic device. The apparatus comprising a cooling device thermally coupled to a heat pipe. The heat pipe having an exposed surface for the selective application of heat thereon. A localized heat source is selectively applied to at least one region of the exposed surface. The heat source preferably capable of being varied both positionally relative to the exposed surface and in heat intensity. A heat shield is preferably positioned around the exposed surface of the heat pipe to isolate the operational cooling device from the localized heat source. A temperature detector repeatedly measures a temperature distribution across the exposed surface while the cooling device is in a heat transfer mode. The temperature distribution is then used to thermally characterize the cooling device.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is based upon and claims priority from prior U.S.patent application Ser. No. 10/982,575, filed on Nov. 5, 2004, theentire disclosure of which is herein incorporated by reference in itsentirety.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates in general to characterizing cooling devices andcooling packages for electronic components and more particularly, to anapparatus and method of thermal characterization of a cooling deviceunder non-uniform heat loads.

2. Description of the Related Art

Microprocessor performance has improved significantly over the lastdecade. To effect this improvement in device performance, the density ofcircuitry has increased. More and more transistors are fabricated insmaller chip size. This has in turn, led to an exponential rise inpackage power densities, and this trend is expected to continue into theforeseeable future. Almost all the electrical energy consumed by thechip package is released into the surroundings as heat, which thusplaces an enormous burden on the cooling device and cooling package.

Existing cooling technologies typically utilize air or water to carrythe heat away from the chip. Heat sinks with heat pipes or vaporchambers are commonly used air-cooling devices, while cold-plates, ofmini and micro scales, are most predominant in water-cooling. Thesedevices are attached to the silicon chip via a thermal interface. Inmany cooling package you can distinguish three components: i) thecooling device; ii) the thermal conductive interface between the coolingpackage and the chip; and iii) the chip or semiconductor device itself.Each of these are described further below. In the following, fordiscussion purposes, the cooling device are referred to as the heat sinkwhich may comprise a fan, cooper fins, a cold plate, mini-channels,mini-duct, micro-channels, micro-ducts, and other similar structures.The cooling package includes the cooling device, the electronic devicesuch as a semiconductor chip, and a thermal interface material betweenchip and cooling device.

FIGS. 1 and 2 show prior art air-cooled and liquid-cooled chip,respectively. Referring to FIG. 1, an air-cooled fin-type heat sink 102is coupled to a silicon chip 104. The heat sink 102 includes a pluralityof cooling fins 106 that are made of a highly thermally conductingmaterial such as copper or aluminum. The fin structure maximizes surfacearea and extracts the heat away from the chip, and transfers the heat toan ambient environment 108. The heat sink 102 can also includes aninternal heat pipe 110 having a wick structure and located between thecooling fins 106 and the chip 104 and a thermally conductive plate 112located between the heat pipe 110 and the chip 104. Finally, a thermallyconductive interface 114, such as grease, epoxy, or solder, couples theheat sink 102 to the chip 104 and allows heat to transfer from the chip104 to the heat sink 102. For reference purposes, the whole structure100 is referred to as the cooling “package.”

Referring now to FIG. 2, a liquid-cooled heat sink 202 is shown coupledto a silicon chip 104. The liquid-cooled heat sink 202 is a sealedenvironment that does not necessarily rely on the environment for heatdissipation, but instead provides a path for the circulation of liquid.The liquid is able to carry away a portion of the heat to a chiller orsome other heat extractor (which could be the environment). The liquidcooled heat sink 202 is coupled to the chip 104 by a thermallyconductive interface 114. Similar to that shown in FIG. 1, the coldplate 202 of FIG. 2 is the actual cooling device while the wholestructure 200 is referred to as the cooling package. Cooling package 200includes the interface 114 and the chip 104. It should be noted that thecold plate 202 comprises mini-channels, micro-channels, mini-ducts andmicro-ducts and other forms of macro/mini/micro cold plates.

In addition to a general rise in the power dissipation due to theabove-mentioned increase in transistor density, microprocessors andother circuitry have been optimized for performance, which has resultedin high heat zones or areas on the device. These zones display muchhigher power densities and lead to ‘hot spots’ on the chip. FIG. 3 is aprior art chip power map showing power distribution. FIG. 4 depicts aprior art temperature distribution on the surface of the cooling device,resulting from the power map of FIG. 3 when the device 104 is cooled asdiscussed with reference to prior art structures. The spatialnon-uniformity of the chip's power distribution causes a correspondingnon-uniformity in power and temperature on the surface of the coolingdevice that is in contact with the chip by means of the thermallyconductive interface 114. This phenomenon can adversely affect thethermal performance of the cooling device, which is typically designedto function and tested under a more spatially uniform heat load.

Heat pipes 110 or vapor chambers have an evaporator section (not shown)that uses known liquid phase change via evaporation or boiling of theresident liquid. This enables the extraction of large amounts of heatfrom the chip surface. Both evaporation and boiling rates, aresignificantly influenced by the magnitude of heat flux and heat fluxdistribution over the surface in contact with the liquid undergoingphase change. Specifically, degradation in cooling ability of the heatpipe 110 occurs at areas of high power density within the device. Thus,when employing a heat pipe or a vapor chamber to cool a microprocessoror an electronic device, if there is a large non-uniformity in the powerdensity of the chip, the boiling and/or evaporation in the evaporatorregion over the chip and interface will also be non-uniform. Theresultant cooling heat transfer coefficient is a dependent function onthe local heat flux distribution on the evaporator surface.

To illustrate this principle, FIG. 5 shows a prior art fully-operationalsilicon chip 104. The chip 104 has three distinct power density areas: alow power density area 502; a moderate power density area 504; and ahigh power density 506. Located directly above and coupled to the chip104 is a heat pipe 110 containing a liquid 508. Within the heat pipe 110and directly above the moderate power density area 504 of the chip 104,is an area 514 where the liquid 508 is boiling. At this point, the phasechange is rapidly occurring and the cooling effect of the heat pipe 110is at a maximum. At area 512, directly above the low power density area502 of the operating chip 104, is an area of little phase change in thecooling liquid 508 (most commonly water), and, therefore, reducedcooling of the chip 104. Finally, at area 516, directly above the highpower density area 506 of the chip 104, an excess amount of vaporgeneration is occurring in the liquid 508. The excess amount of vaporgeneration creates a blanket of vapor 518 that prevents the liquid 508from contacting the plate 112 and efficiently dissipating the heat fromthe plate 112, thereby causing the cooling coefficient of the coolingdevice 110 to drop off rapidly.

FIG. 6 a prior art graphic illustrates how the variation of a boiling orevaporation cooling coefficient is a function of input power density.Three points along the graph 612, 614, and 616, correspond to the sameareas, 512, 514, and 516, in FIG. 5. In FIG. 6, it can be seen that thecooling coefficient increases with power density until it reaches anoptimal value 614, after which it reduces sharply

Thus, under these circumstances it is advantageous to understand anddesign for, the thermal behavior of the cooling device under non-uniformchip heat load. To enable this understanding and design, it is desirableto characterize and measure the performance of these cooling deviceswhen they are subjected to this spatially non-uniform chip power. Also,the chip power density is dependent on the application, i.e. the natureof its activity. Thus, the same chip under different applications willpossess a different power density. Therefore, it is also desirable todesign for a flexible or dynamically changing power map.

SUMMARY OF THE INVENTION

Briefly, in accordance with the present invention, disclosed is a methodand apparatus for application of a non-uniform heat load to a coolingdevice, as well as a measurement and characterization of the thermalperformance of: (i) the cooling device only; (ii) the complete coolingdevice package (i.e. cooling device, thermally conductive interface andchip); and (iii) the thermal conductive interface only. The inventivemethod and apparatus do not require physical coupling of measurementequipment to the device under test and, therefore, provide many benefitsover the use of resistance heaters for power applications,thermocouples, and IR thermal imaging for temperature measurement. Themethod and device disclosed herein will also allow for rapid variationof hot spot or high power density locations on the device under test.

In one embodiment, the present invention comprises an apparatus forthermally characterizing an operational cooling device for a processingdevice, wherein the apparatus comprises an operational cooling device, alocalized heat source that is applied to at least one region on thecooling device, and a temperature detector for measuring a temperaturedistribution.

The cooling device is of the type commonly used to cool microprocessorsin computing applications and is coupled to an electronic device for thepurpose carrying away heat during operation of the electronic device.Exemplary embodiments of the cooling device are heat pipes, vaporchambers, cooling fins, or cold plates cooled by either a group ofmacro-channels, micro-channels, mini-channels, micro-ducts, mini-ductsand/or a fan assembly. The cooling device can also be other structuresuseful for cooling computer chips or other similar electronic devices.

Localized heat is applied to the cooling device through the use of aheat generator, which can be a laser, a focused lamp, a directedconvective heat flow generator, a heat element, an electromagneticradiator, or any other device capable of generating and transferringfocused heat. In one embodiment, the heat generator is laser and a beamsplitting optical element (Wollaston prism) is utilized to split a laserbeam produced by the laser into two paths so that the cooling devicereceives two separate focused heating areas. The focused heat source canalso be repositioned and applied to a plurality of locations on thedevice so that the effect of non-uniform heat in each area can bediscerned.

In another embodiment of the present invention, a bias heat is alsoapplied to the cooling device by a bias heat source. The bias heatsource applies more or less uniform heat to a larger area of the coolingdevice and can be realized by a heat gun or any other similar devicecapable of applying uniform heat to an entire area. In other cases avery slightly focused UV-lamp or a diode laser array may be used. Addingthe bias heat in conjunction with a focused heat source more closelysimulates the heat characteristics of an electronic device than does asingle focused heat source. In fact, in one embodiment, the bias heat isgenerated by coupling an electronic device, or “test chip” to thecooling device and operating the test chip in a uniform heat-generatingmanner. In the embodiment utilizing the test chip, the focused heat fromthe laser or others heat generators can be applied to locations on thetest chip itself.

The temperature detector can be a photon detector that receives athermal image of the area on the cooling device and uses the thermalimage to determine the temperatures on the device. An example is an IRthermal imager or a fluorescence imager (where the fluorescence orphosphorescence lifetime of a molecule which was applied to the coolingdevice is temperature dependent), and/or a CCD camera, which detects thetemperature dependent thermal reflectance of the device.

In yet another embodiment, the cooling device is coated with a blackbodycoating to help absorb the laser beam and increase the emissivity of thecooling device, which improves the temperature measurements. In otherembodiments, the test chip is coated with the blackbody coating. Instill other embodiments, a layer of the blackbody coating is placedbetween the test chip and the cooling device in order to measure thethermally conductive interface between the chip and cooling device.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying figures where like reference numerals refer toidentical or functionally similar elements throughout the separate viewsand which together with the detailed description below are incorporatedin and form part of the specification, serve to further illustratevarious embodiments and to explain various principles and advantages allin accordance with the present invention.

FIG. 1 is a cross-sectional diagram of a prior art heat sink coupled toan electronic device.

FIG. 2 is a cross-sectional diagram of a second embodiment of a priorart heat sink coupled to an electronic device, specifically a liquidcooled cold plate.

FIG. 3 is a three-dimensional power distribution map of an operationalprior art electronic device.

FIG. 4 is a three-dimensional temperature distribution map of anoperational prior art cooling device attached to an operationalelectronic device.

FIG. 5 is a cross-sectional diagram of a prior art operational heat pipecoupled to an electronic device.

FIG. 6 is a prior art graphical illustration of the cooling coefficientof an embodiment of a cooling device, namely an air cooled heat sinkwith a vapor chamber, compared to the power density of an electronicdevice.

FIG. 7 is a block diagram illustrating a prior art electronic device,under load and emanating heat.

FIG. 8 is an exemplary prior art graphical representation of a thermaldistribution generated by the electronic device of FIG. 7.

FIG. 9 is a cross-sectional diagram of the operational prior art heatsink of FIG. 1.

FIG. 10 is a cross-sectional diagram of an operational heat pipe encasedin a cooling block and the application of a focused heat source to theheat pipe and the detection of thermal characteristics by a thermaldetector, according to an embodiment of the present invention.

FIG. 11 is a graphical illustration of a single laser beam being splitinto two laser beams by the use of a Wollaston prism, according to anembodiment of the present invention.

FIG. 12 is a graphical illustration of temperature distributions causedby application of varying power levels of a heat source to a heat pipe,according to an embodiment of the present invention.

FIG. 13 is a cross-sectional diagram of an operational heat pipe encasedin a cooling block and the application of a focused heat source and abias heat source to the heat pipe and the detection of thermalcharacteristics by a thermal detector, according to an embodiment of thepresent invention.

FIG. 14 is a cross-sectional diagram of an operational heat pipe encasedin a cooling block and the application of a heat source to a test chipcoupled to the cooling block through a thermally conductive interfaceand the detection of thermal characteristics by a thermal detector,according to an embodiment of the present invention.

FIG. 15 is a cross-sectional diagram of a heat sink coupled to anelectronic device, with a thermally conductive interface, illustratinghow to measure a temperature difference between the thermal interfacematerial according to an embodiment of the present invention.

FIG. 16 is a block diagram of a system for measuring temperature andpower distributions of a fully operating electronic device, according toan embodiment of the present invention.

DETAILED DESCRIPTION

It should be understood that these embodiments are only examples of themany advantageous uses of the innovative teachings herein. In general,statements made in the specification of the present application do notnecessarily limit any of the various claimed inventions. Moreover, somestatements may apply to some inventive features but not to others. Ingeneral, unless otherwise indicated, singular elements may be in theplural and vice versa with no loss of generality. In the drawings, likenumerals refer to like parts through several views.

While the specification concludes with claims defining the features ofthe invention that are regarded as novel, it is believed that theinvention will be better understood from a consideration of thefollowing description in conjunction with the drawing figures, in whichlike reference numerals are carried forward.

Electronic Device

FIG. 7 shows a prior art electronic device 104 (previously shown in FIG.1), having a top surface 702 emanating heat. The particular device shownis an electronic device composed of passive (e.g. resistors, diodes,capacitors and inductors) and/or active components (e.g. gates andtransistors). The electronic device includes memory devices, dedicatedand general purpose microprocessors, micro-controllers and alike. Theseelectronic devices are constructed over organic and inorganic circuitswith internal communication paths using electric current and/or lightand/or other electromagnetic waves. Heat emanations are shown as arrows704, 706 and 708 rising from the device 104. Note that heat 704, 706 and708 originates from different locations on the top surface 702 ofelectronic device 104. Typically, heat is a product of power dissipationwithin the device 104 under operating conditions, and therefore heatincreases in proportion to power.

Distribution of Heat and Power

FIG. 8 is an exemplary prior art graphical representation of atemperature distribution generated by the device in FIG. 7. FIG. 8graphically shows the presence of non-uniform temperature distributionson the top surface 702 of the electronic device 104. The top surface 702of the electronic device 104 is divided into three different shadedareas 802, 804, and 806. Each shaded area 802, 804, and 806 refers to atemperature interval. For example, shaded area 802 may refer to atemperature interval of about 75-90 degrees Centigrade, shaded area 804may refer to a temperature interval of about 55-75 degrees Centigradeand shaded area 806 may refer to a temperature interval of about 30-55degrees Centigrade. Thus, in relation to the other temperatures on thetop surface 702 of the electronic device 104, area 802 represents thehighest concentration of heat dissipation, known as a “hot spot”. Achallenge in the development and design of cooling devices is theremoval of excessive heat and non-uniformities in heat and power loads.

Cooling Device

Described now is an exemplary embodiment of the present invention.Referring to FIG. 1, an air-cooled fin-type heat sink assembly 102 iscoupled to a silicon chip 104. The heat sink assembly 102 includes aplurality of cooling fins 106 that are made of a thermally conductivematerial such as copper or aluminum. The fin structure maximizes surfacearea and extracts the heat away from the chip 104, and rejects it to anambient environment 108. The heat sink assembly 102 can also include aninternal heat pipe or vapor chamber structure 110 located between thecooling fins 106 and the chip 104 and a thermally conductive plate 112located between the heat pipe 110 and the chip 104. Finally, a thermallyconductive interface 114, such as grease, epoxy, solder, or liquid metalpaste couples the heat sink 102 to the chip 104 and allows heat totransfer from the chip 104 to the heat sink 102.

In other embodiments, the cooling device is a liquid-cooled heat sink202. The liquid-cooled heat sink 202 is a sealed environment that doesnot necessarily rely on the ambient environment for heat dissipation,but instead provides a path for the circulation of liquid over the chip104. The liquid is able to carry away a portion of the heat to a chilleror some other heat extractor. Liquid cooled heat sinks are also coupledto the chip by a thermally conductive interface 114. The difference intemperature between the inlet and outlet of the cooled block can beused, in conjunction with the flow rate (volumetric or mass flow), todetermine the power absorbed from the laser.

Heat Pipe

Referring now to FIG. 9, a Prior Art heat pipe 110 is shown. A heat pipe110 is a device that can quickly and efficiently transfer heat from onepoint to another. A vapor chamber 900 comprises a sealed chamber 902surrounding a capillary wicking material 904, a central cavity for vaporflow known as a vapor core 912, and a working fluid 906 (commonlywater). The sealed chamber 902 isolates the working fluid 906 from theoutside environment. The sealed chamber 902 should, therefore, beleak-proof, maintain the pressure differential across its walls, andenable transfer of heat to take place from and into the working fluid906.

The primary purpose of the vapor core is to transport the vapor from theevaporator region where it absorbs the latent heat of vaporization tothe condenser region where it releases this heat, thereby enabling heattransport from one part of the vapor chamber to another. The primepurpose of the wick material 904 is to generate capillary pressure totransport the working fluid from a condenser section 908 at either endof the pipe 110 to an evaporator section 910 located adjacent to a heatsource 104 coupled to the pipe 110. The wicking material 904 is porousand creates an evaporation-condensation cycle that transports heat anddrives the condensate back to the evaporator section 910 by thecapillaries in the wick material 904.

When heat is applied at one or more points along the outer surface ofthe sealed chamber 902, the liquid 906 evaporates or boils and enters avapor state. During this process, the liquid 906 picks up the latentheat of vaporization. In its gaseous form, the liquid 906 has a higherpressure and is drawn to the cooler locations via the vapor core withinthe chamber 902, where it condenses. In this way, heat is transportedfrom the input 910 to the output end, or ends 908, of the heat pipe 110.

Method and Apparatus for Characterization of Temperature of CoolingDevice under Highly Non-Uniform Heat Load

It will now be shown that for the first time characterization of thetemperature removal capability of a fully operational cooling deviceunder highly non-uniform heat load is possible. As will be apparent fromthe following discussion, an external heat source and device formeasuring the resultant temperature, while the device is fullyoperational, allows the thermal characterization of the cooling device.

FIG. 10 is a cross sectional diagram depicting one embodiment of thepresent invention. FIG. 10 shows a cooling device 1002, which includes awater-cooled cold block 1008 partially encapsulating a heat pipe 110.Also shown in FIG. 10 is a heat source 1004, and a means for measuringtemperature distribution 1006.

Temperature Detector

Any kind of thermal detector can be used but a photon-detector is ableto accurately and remotely measure a temperature distribution on adevice. A photon-detector detects photons comprising the luminescencefrom the electronic device, which may be temperature dependent. Inanother scheme the optical reflectance may be used. In this case abroadband lamp (preferably an LED) would illuminate the surface 1010 anda CCD camera would measure the change in reflectance. The photons changeoptical reflectivity with temperature. Infrared detection using a camera1006 will be shown and discussed throughout the remainder of thisspecification, however, it is important to note that other types ofphoton detection and photon detectors are within the true scope andspirit of the present invention. In order to enhance the IR temperaturemeasurement a black body coating may be used. A typical coating may beblack paint. In some cases it is necessary to apply this blackbodycoating very thinly in order to ensure that the thermal measurements arenot disturbed significantly. In other embodiments of the presentinvention, alternative temperature sensing techniques could beimplemented, such as thermal reflectance and fluorescence imaging.

The function of the illustrative infrared camera 1006 is to capturethermal information of the cooling device 1002 during operation. Morespecifically, the infrared camera 1006 is able to capture thermalinformation of a surface 1010 of the heat pipe 110 as a function ofposition of a localized heat source 1004. Thus, the infrared camera 1006captures and records thermal information and position information foreach temperature reading. This allows the generation of a thermaldistribution profile of the surface 1010 of the heat pipe 110. In FIG.10 the surface 1010 may be coated with a black body coating. Forinstance, the camera 1006 can identify the distribution of heat from alocalized heat source applied to the surface 1010 of the heat pipe 110.The distribution can vary depending on the power level of the heatsource applied and the cooling characteristics of the cooling device1002.

Heat Source

Referring still to FIG. 10, a heat source 1004 is shown being applied tosurface 1010 of heat pipe 110. In one embodiment, the heat source 1004is a focused laser beam. A standard beam analyzer can be used tocharacterize the intensity distribution of the “focused” laser beam.However, many other techniques and devices for applying a heating powerto the device 1002 will work equally as well to realize the objects ofthe present invention including contact and not contact heating methodsworking by heat convection, heat conduction or heat radiation or acombination of all three. These heating methods include lasers, focuslamps, resistive heaters, directed convection flow and heat elements. Asimple 5 W laser can easily realize 500 W/cm2 by only slightly focusingthe laser beam on an 1 mm² area. If higher peak power densities arerequired, the beam can be focused tighter or a higher power laser willbe used.

A blackbody coating can greatly enhance the absorption and control theabsorption of the laser power on the surface 1010. The absorption can bemeasured independently by monitoring, using a standard photo detector,the amount of reflected and incident light assuming that the transmittedlight is very small (which is a very good assumption).

As explained above, a chip 104 may have one or more “hot spots” of amaximum temperature that a cooling device is expected to thermallyreduce. So that it can be determined how the cooling device will handlehot spots of varying temperatures and locations, the focused heat source1004 is applied to selected regions of the surface 1010 of the coolingdevice 1002 to mimic hot spots. The beam 1012 can be aimed at variouslocations on the surface 1010 to test a plurality of hot spot areas.

Because it is not uncommon for some chips to have more than one hotspot, it may be desirable to apply more than one focused heating laserbeam to the surface at a given time. FIG. 11 shows the heat source 1004directing a laser beam 1012 into a Wollaston prism 1100. Wollastonprisms are well known in the art and are able to receive a single inputbeam 1012 and produce two output beams 1102 and 1104. Through the use ofone or more Wollaston prisms, a single laser 1004 can produce multiplehot spots. It is important to realize that other beam splitting elementscan be used as well and they are well-known by those of ordinary skillin the art.

Referring now to FIG. 12, illustrated are five measured temperaturedistributions of a state of the art heat pipe 110 with different laserpowers of 1 Watt to 5 Watt, respectively, simulating a high powerdensity region of an electronic device, are shown. The image size is 35mm×35 mm and the initial laser spot 1202 shows a Gaussian distributionof 1.95 mm and 1.61 mm as 1/e2 full width. The laser spot 1202 iselongated because, as can be seen in FIG. 10, the laser beam 1012 is nothitting the surface 1010 of the heat pipe 110 at normal incidence. Ascan be seen in the series of 5 image depictions in FIG. 12, as the powerincreases, so too does the size of the hot spot maximum temperatureregion. However, the more efficient the cooling device, the smaller thehot spot will be at a given power. Knowing this characterizationinformation for a particular cooling device allows for the mostefficient and optimal design.

Although, so far, the present invention has been shown and described inconjunction with a cooled block cooling system, other embodiments willwork equally as well. For instance, the cooling device can be replacedwith a simple heatsink or heatsink/fan assembly.

Blackbody Coating

Under certain circumstances it may be preferred to coat the heat pipesurface 1010 with a thin blackbody coating. This coating helps to absorbthe laser beam and increases the emissivity of the cooling device, whichimproves the temperature measurements. The coating is preferably as thinas possible so that it does not alter the thermal behavior of thecooling device. Several good blackbody coatings shown to be usedadvantageously is black paint, a Cr coating on a rough (rougher than thedetected wavelength of the blackbody radiation) surface, or a carboncoating. The thickness should be less than 0.1 micron, which will besufficient for boosting the emissivity and to absorb the laser light.

Bias Heat

In an embodiment shown in FIG. 13, in addition to the hot spot generatedby the laser 1004, a bias heat flux is applied to the surface 1010 ofthe heat pipe 110 using the heat from a directed hotgun 1302. Instead ofthe hotgun 1302, a high power UV lamp or a laser diode array may be usedto provide the bias heat flux. Adding bias heat better simulates theconditions found in actual use, as most electronic devices 104 do notprovide a single hot spot, but rather provide a generally much higherthan ambient temperature across the entire body of the device 104. Inorder to avoid stray heating of the cooled block 1008 by the hot gun, ashield 1304 is provided to block the hot air of the hotgun 1302 from thecooled block 1008.

Referring again to FIG. 13, it can be seen that in one embodiment of thepresent invention, slots 1306 and 1308 are provided in the cooling block1008 for the insertion of thermocouples (not shown). The slots are onopposite ends of the cooling block 1008 so that the thermocouples canmonitor the heat pipe boundary temperatures. In another embodiment, thedifference in temperature of the liquid 906 between the inlet 1310 andthe outlet 1312 are measured along with the flow rate (volumetric ormass flow rate) of the liquid 906 to determine the amount of powerabsorbed by the cooling device 1002. An increase in temperature of thefluid 906 between the inlet and the outlet directly corresponds to powerabsorbed by the cooling device 1002. In yet another embodiment, the wicktemperature is measured to further characterize the cooling device 1002.

Characterization of Temperature of Complete Cooling Package underNon-Uniform Heat Load

As explained above, and now shown in FIG. 14, a test chip 104 can bephysically coupled to the cooling device 1002. Further, a thermallyconductive interface can be used to measure the temperature of thecomplete cooling package. In this embodiment, test chip 104 has a heater1508 patterned on the circuitry side (facing towards the camera 1006 andnot shown in this view) of the test chip 104. Directed heat from theheat source 1004 is then applied onto the test chip 104. The test chip104 can provide bias heat if power is applied to the heater 1508. Thedirected heat from the heat source 1004 creates a hot spot on the chip,which is then thermally transferred onto the heat pipe 110.

Measuring the thermal distribution on the circuitry side of the testchip 104 (towards the camera 1006) allows a characterization of thecomplete cooling package including the test chip and the thermalinterface (not shown). For instance, if the temperature at the hot spotapplied by the heat source 1004 becomes large in size, it can thereforebe determined that the cooling device 1002 is unable to remove asufficient amount of heat from the chip 104. Alternatively, if thetemperature of the hot spot remains relatively small, it is then knownthat the cooling device 1002 is capable of carrying away at least aportion of the heat being applied by the heat source 1004 and that,actual use, a working electronic device with a similar hot spot will notdamagingly heat adjacent areas on the working electronic device.

Characterization of Temperature Difference Across the Thermal Interface

Referring now to FIG. 15, another embodiment of the present invention isshown where a test chip 104 is coupled to a cooling device 1002. In thisembodiment, the test chip 104 is constructed of a transparent material,such as silicon. An oil interface 1502 is placed between the test chip104 and the cooling device 1002 to facilitate an efficient thermalcoupling between the two devices. In addition, a blackbody coating 1504is provided between the oil interface 1502 and the cooling device 1002,and a second blackbody coating 1506 partially covers the surface of thetest chip 104 opposite the surface facing the cooling device 1002.Different coatings, which are thin enough not to influence the thermalproperties, can help to absorb a laser beam at different locations ofthe test chip 104 and control the temperature measurements using the IRcamera 1006.

The configuration shown in FIG. 15 may provide for a characterization ofthe thermal interface material, such as the oil interface 1502, inactual use. In one embodiment, the heater 1508 of the test chip 104 isused to heat the oil interface 1502. By measuring the thermaldistribution at the oil interface 1502 and at the second blackbodycoating 1506, the temperature difference across the thermal interfacematerial and the test chip 104 can be inferred, and, combination withthe electrical power in the heater 1058, the thermal resistance can bederived. In another embodiment, the interface surface between the testchip 104 and the oil interface 1502 is coated with a black body coating.In that case, measure the temperature difference just across the thermalinterface can be measured. The general idea is that by applying theblack body coating at different locations, individual elements of thecooling package can be measured separately. In addition, a laser beam1012 from the heat source 1004 applied to different parts of the coolingpackage can help to measure the thermal response under non-uniform heatload.

Computer System for Computing Thermal Measurements

FIG. 16 shows a system 1600 for measuring thermal characteristics of acooling device in accordance with the present invention. The system 1600includes a computer 1602 and a computer readable medium 1604 that holdsinstructions that the computer can execute in accordance with thepresent invention. The computer 1602 is connected to table 1606 thatholds the cooling device 1002. Located above the device 1002 is a heatsource 1004 and a infrared camera 1006.

By placing the computer readable medium 1604 into the computer 1602, thecomputer 1602 can read instructions contained on the medium 1604 andcontrol the system 1600 to measure the thermal characteristics of thecooling device 1002. In one embodiment, the heat source 1004 and camera1006 move in relation to the device 1002 in the X-Y direction. In asecond embodiment the table 1606 moves the device 1002 in the X-Ydirections in relation to the camera 1006 and heat source 1004. In yetanother embodiment, the camera 1006 and heat source 1004 are able tomove independent of one another. The computer 1602 is able to controlthe movements in either embodiment.

The computer 1602 is able to communicate with the temperature detector1006 and record the temperature values of the regions on the device 100.The computer can then quickly process the information and solveequations for characterizing the cooling device.

While the preferred embodiments of the invention have been illustratedand described, it will be clear that the invention is not so limited.Numerous modifications, changes, variations, substitutions andequivalents will occur to those skilled in the art without departingfrom the spirit and scope of the present invention as defined by theappended claims.

1. An apparatus for thermally characterizing an operational coolingdevice package, the apparatus comprising: an operational cooling deviceas part of a cooling package for cooling an electronic device; a testchip having a circuitry side and a top side opposite the circuitry side;the top side of the test chip thermally coupled to the cooling device; alocalized heat source that is applied to at least one region on the testchip; and a temperature detector for measuring, on the circuitry side ofthe test chip, a temperature distribution on the cooling package.
 2. Theapparatus according to claim 1, wherein the cooling device comprises: atleast one of a heat pipe, a vapor chamber, a coldplate, a minichannel, amicrochannel, and a fan/pump/compressor.
 3. The apparatus according toclaim 1, wherein the test chip comprises a resistive heater to providebias heat.
 4. The apparatus according to claim 1, further comprising: atleast one beam splitting optical element for spitting a laser beam intoat least two paths for supplying the localized heat source to aplurality of regions on the cooling device.
 5. The apparatus accordingto claim 1, wherein the temperature detector comprises at least one of athermal resistive sensor and a thermocouple sensor.
 6. The apparatusaccording to claim 5, wherein the at least one of the thermal resistivesensor and the thermocouple sensor is embedded on the test chip.
 7. Theapparatus according to claim 1, wherein the temperature detectorcomprises at least one of an IR thermal imager and a thermal reflector.8. The apparatus according to claim 1, further comprising: a blackbodycoating applied to a region of the test chip to facilitate temperaturemeasurement.
 9. The apparatus according to claim 1, further comprising:a thermal interface material disposed between the top side of the testchip and the cooling device.
 10. The apparatus according to claim 9,further comprising: a blackbody coating disposed on at least one of thetop side of the test chip and the cooling device, to measure thetemperature difference across the thermal interface material.
 11. Amethod of thermally characterizing an operational cooling device for anelectronic device, the method comprising: operating a cooling device;thermally coupling a side of a test chip directly to the cooling device;applying a localized heat source to at least one region on theoperational cooling device; measuring, at a circuitry side of the testchip, a temperature distribution of the cooling device, wherein thecircuitry side of the test chip is a side of the test chip opposite theside of the test chip coupled to the cooling device.
 12. The methodaccording to claim 11, wherein the cooling device comprises at least oneof a heat pipe, a vapor chamber, a cold plate, a minichannel, amicrochannel, and a fan/pump/compressor.
 13. The method according toclaim 11, further comprising: applying a bias heat source to the coolingdevice.
 14. The method according to claim 13, wherein the bias heatsource comprises at least one of an electromagnetic radiator and adirected convective heat flow generator.
 15. The method according toclaim 11, further comprising: splitting a laser beam into at least twopaths for supplying the localized heat source to a plurality of regionson the cooling device.
 16. The method according to claim 11, wherein thetemperature detector comprises at least one of an IR thermal imager, afluorescence imager, and a CCD camera.
 17. The method according to claim16, further comprising: coating at least one region on the coolingdevice with a blackbody coating to enhance the temperature measurements.18. The method according to claim 11, wherein the test chip comprises aresistive heater to provide bias heat.
 19. The method according to claim11, further comprising: applying a blackbody coating to at least part ofa region of the test chip to facilitate temperature measurement.
 20. Themethod according to claim 11, wherein measuring the temperaturedistribution comprises: receiving a thermal image of an area on thecooling device with a photon detector; and using the thermal image ofthe area on the cooling device to determine the temperature.
 21. Themethod according to claim 11, further comprising: measuring an inlet andan outlet water temperature and a speed of water entering and exitingthe cooling device to determine power absorbed by the cooling device.